Product Compact film thickness monitor

Overview

Film thickness monitor with the compact fiber probe is based on the spectrophotometry.
It can be used as an in-line or end-point monitor for the various multi-layered film process.
The compact probe can be installed in a small space inside the process tool.
It is also possible to judge the mixture ratio of the mixed layer
or the crystallinity of Poly-Silicon by using the EMA theory.

can be installed in a small space inside the process tool.
Since the probe is connected with a optical fiber , it has good durablity.

  • Evaluation of mixing ratio of the composite material using EMA
  • Crystallinity and Analysisy of the optical constants

Light source

Wavelength range
(nm)

Typical life time
(Hours)

White color LED

430 - 700

> 50,000

Tungsten-Halogen

400 - 900

10,000

Deuterium-Halogen

200 - 1,000

1,000

TOP

​ ​